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China Makes Breakthrough in EUV Light Source Technology, Challenging Global Chipmaking Monopoly
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China Makes Breakthrough in EUV Light Source Technology, Challenging Global Chipmaking Monopoly

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The Researcher Daily
Apr 30, 2025
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Scientific China
China Makes Breakthrough in EUV Light Source Technology, Challenging Global Chipmaking Monopoly
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In a landmark advance for China’s semiconductor industry, a team of Chinese scientists has developed an extreme ultraviolet (EUV) light source platform that matches international benchmarks1 — a crucial step toward domestic production of cutting-edge computer chips.

According to a research paper published this week Lin, N., et al. (2025), the breakthrough…

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